Accession Number:

ADA031154

Title:

Electron Beam Fabrication of Surface Acoustic Wave Transducers.

Descriptive Note:

Final rept. 1 Jan-31 Dec 75,

Corporate Author:

ADVANCED METALS RESEARCH CORP BEDFORD MASS

Personal Author(s):

Report Date:

1976-09-01

Pagination or Media Count:

95.0

Abstract:

Techniques were developed to utilize an electron beam system to fabricate surface acoustic wave transducers. Transducers were fabricated and the electron exposure process was explored. Electron resist techniques were developed and successfully used. System programming was developed and advanced programming concepts were initiated. Procedures were developed to cover a range of geometrical configurations.

Subject Categories:

  • Line, Surface and Bulk Acoustic Wave Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE