Electron Beam Fabrication of Surface Acoustic Wave Transducers.
Final rept. 1 Jan-31 Dec 75,
ADVANCED METALS RESEARCH CORP BEDFORD MASS
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Techniques were developed to utilize an electron beam system to fabricate surface acoustic wave transducers. Transducers were fabricated and the electron exposure process was explored. Electron resist techniques were developed and successfully used. System programming was developed and advanced programming concepts were initiated. Procedures were developed to cover a range of geometrical configurations.
- Line, Surface and Bulk Acoustic Wave Devices