An Investigation of the Possible Application of Laser Trimming to Acoustical Transducers.
ROME AIR DEVELOPMENT CENTER GRIFFISS AFB N Y
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An experimental investigation has been made of the possibility of using a laser to remove shorts and to trim lengths of high frequency interdigital transducers. Such a laser is required to have the capability of removing pieces of the metallic electrodes in increments of 1 sq micron or less. The experiment was performed on a 1000 A thick aluminum layer on top of a 300 A thick chromium layer on a quartz substrate which is a typical coating used for making interdigital transducers. Using a doubled NdYAG laser wavelength 0.532 micron with a pulse of about 100 nsec it was found that holes of area 1 sq micro could be punched with a pulse energy of about 1 microjoule. Author
- Electrical and Electronic Equipment
- Lasers and Masers
- Fabrication Metallurgy