Accession Number:

ADA026517

Title:

Characterization of Insulating Regions Created in Silicon-on-Sapphire by Ion Implantation.

Descriptive Note:

Final technical rept. 1 Oct 74-31 Aug 75,

Corporate Author:

HUGHES RESEARCH LABS MALIBU CALIF

Report Date:

1975-11-01

Pagination or Media Count:

84.0

Abstract:

This research program was concerned with the fabrication of isolation electrically insulating regions in silicon-on-sapphire SOS wafers for application to integrated circuit technology, radiation hard MOS ICs in particular.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE