Charge-Coupled Scanned IR Imaging Sensors
Semiannual rept. no. 4, 1 May-30 Oct 1975
RCA LABS PRINCETON NJ
Pagination or Media Count:
The ultimate goal of this work is the fabrication of a two- dimensional infrared imager. The authors previous work with the 64 x 1 line array has proven the feasibility of the Schottky-barrier detector siliconCCD system, and has, in the vidicon mode, demonstrated a uniformity approaching that needed for thermal imaging. In the present work, the two-dimensional imager is being designed and fabricated. The first arrays will again have palladium- silicide on p-silicon as the detector system, but subsequent arrays will be made with platinum-silicide for deeper IR response. A line array is also included on the chip to provide additional features. The considerations that have gone into the design are discussed below. Quantitative infrared measurements have already begun and have yielded good agreement with previous measurements on the absolute quantum efficiency of PdSip-Si detectors.
- Electrical and Electronic Equipment
- Infrared Detection and Detectors