Accession Number:

ADA024907

Title:

An Evaluation of Silicon on Sapphire Technology.

Descriptive Note:

Final rept. 1 Mar 75-1 Mar 76,

Corporate Author:

ROME AIR DEVELOPMENT CENTER GRIFFISS AFB N Y

Personal Author(s):

Report Date:

1976-03-01

Pagination or Media Count:

152.0

Abstract:

Silicon on sapphire is a recent microelectronic circuit technology originally devised to eliminate the drawbacks of conventional junction isolation. It has since developed into a high performance MOS-type integrated circuit family. In this report a description of this logic family is given, including such topics as manufacturing processes, device physics, and performance of commercial circuits. The report concludes with an overall evaluation of this technology. Author

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE