An Evaluation of Silicon on Sapphire Technology.
Final rept. 1 Mar 75-1 Mar 76,
ROME AIR DEVELOPMENT CENTER GRIFFISS AFB N Y
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Silicon on sapphire is a recent microelectronic circuit technology originally devised to eliminate the drawbacks of conventional junction isolation. It has since developed into a high performance MOS-type integrated circuit family. In this report a description of this logic family is given, including such topics as manufacturing processes, device physics, and performance of commercial circuits. The report concludes with an overall evaluation of this technology. Author
- Electrical and Electronic Equipment