Accession Number:

ADA022974

Title:

Control of Microcircuit Contamination. A Microsensor for Moisture Measurement.

Descriptive Note:

Final technical rept. 5 Apr 74-22 Aug 75,

Corporate Author:

TEXAS INSTRUMENTS INC DALLAS

Personal Author(s):

• Cordasco,Vincent T.

Report Date:

1976-03-01

Pagination or Media Count:

39.0

Abstract:

An anodized aluminum microsensor was developed for in-package monitoring of moisture in microcircuit package atmospheres. Sensors were characterized with respect to accuracy, reproducibility and operational limitations. Investigations included package self-generated contamination, sensor temperature cycling, stability studies, and comparison with mass spectrometry. Compatibility with semiconductor package design is discussed. Author

Descriptors:

• *MOISTURE CONTENT
• *MEASURING INSTRUMENTS
• *MICROCIRCUITS
• *PACKAGED CIRCUITS
• DETECTORS
• WATER
• ALUMINUM
• ANODIC COATINGS
• GAS DETECTORS

Subject Categories:

• Electrical and Electronic Equipment
• Test Facilities, Equipment and Methods

Distribution Statement:

APPROVED FOR PUBLIC RELEASE