Control of Microcircuit Contamination. A Microsensor for Moisture Measurement.
Final technical rept. 5 Apr 74-22 Aug 75,
TEXAS INSTRUMENTS INC DALLAS
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An anodized aluminum microsensor was developed for in-package monitoring of moisture in microcircuit package atmospheres. Sensors were characterized with respect to accuracy, reproducibility and operational limitations. Investigations included package self-generated contamination, sensor temperature cycling, stability studies, and comparison with mass spectrometry. Compatibility with semiconductor package design is discussed. Author
- Electrical and Electronic Equipment
- Test Facilities, Equipment and Methods