Accession Number:

ADA007003

Title:

Silicon Nitride Surface Passivation,

Descriptive Note:

Corporate Author:

IIT RESEARCH INST CHICAGO ILL RELIABILITY ANALYSIS CENTER

Personal Author(s):

Report Date:

1969-09-01

Pagination or Media Count:

41.0

Abstract:

The monograph presents a review of the state of the art of silicon nitride usage by discussing Problems with use of silicon dioxide Background The uses of silicon nitride in the planar process Silicon nitride processing Reliability experience with silicon nitride.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE