Automatic Control System for Microcircuit Production Processes,
ARMY FOREIGN SCIENCE AND TECHNOLOGY CENTER CHARLOTTESVILLE VA
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The article discusses requirements for reliable computer-controlled production of integrated circuits, using electron-beam technology. Such a unit, developed and tested by the Ukranian SSR Academy of Sciences Institute of Cybernetics, is discussed. Illustrations, a block diagram, sample flow sheets and a partial wiring diagram, are presented. More than 400 pattern codes are stored in the computer memory. Duration of processing pulses and the intervals between them are regulated between 2 microsec and 10.2 sec, and the first operating test is said to have given close to 100 reproducibility of the electrical characteristics of integrated circuit components.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems