Accession Number:

ADA000833

Title:

Charge Transport and Polarization Effects in Dielectrics of MSI/LSI Devices.

Descriptive Note:

Final rept. Feb 72-Jul 74,

Corporate Author:

INTELCOM RAD TECH SAN DIEGO CALIF

Personal Author(s):

Report Date:

1974-09-01

Pagination or Media Count:

58.0

Abstract:

The purpose of the program was to investigate the magnitude and characteristics of the charge transfer and polarization that occur during an ionization pulse in typical oxide dielectrics used in MSILSI devices especially those used for passivation and separation of multilevel metalizations.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE