Charge Transport and Polarization Effects in Dielectrics of MSI/LSI Devices.
Final rept. Feb 72-Jul 74,
INTELCOM RAD TECH SAN DIEGO CALIF
Pagination or Media Count:
The purpose of the program was to investigate the magnitude and characteristics of the charge transfer and polarization that occur during an ionization pulse in typical oxide dielectrics used in MSILSI devices especially those used for passivation and separation of multilevel metalizations.
- Electrical and Electronic Equipment