Simultaneous Actuation and Sensing of Electrostatic MEMS
[Technical Report, Master's Thesis]
AIR FORCE INSTITUTE OF TECHNOLOGY WRIGHT-PATTERSON AFB OH
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Micro-Electro-Mechanical Systems MEMS are devices that play important roles of sensing and actuation in many different industries including automation, electronics, medical, communications, and defense. In order to make full use of these devices, it is important to understand the peripherals that enable these devices. Simultaneous actuation and control of MEMS is an important area of research as it enables feedback control of these devices and allow them to maintain performance as they depreciate over their lifetime. The aim of this thesis is to perform a design space analysis on an electrostatic MEMS simultaneous actuation and sensing circuit that is driven by a Pulse Width Modulated PWM signal and sensed by a capacitor divider interface circuit. A new variant to the capacitor divider interface is discussed and takes advantage of the leakage problem associated with this circuit. Furthermore, the important design variables and their impacts are investigated. The results found herein are generalized and may be applied to any electrostatic MEMS.
- Electrical and Electronic Equipment