Accession Number:



Sputtered Platinum (Pt) Electrode Development for Lead Zirconate Titanate (PZT) Piezoelectric Microelectromechanical Systems (MEMS) Devices

Descriptive Note:

[Technical Report, Technical Report]

Corporate Author:

U.S. Army Combat Capabilities Development Command, Army Research Laboratory

Report Date:


Pagination or Media Count:



The AJA ATC 2200 sputtering tool in the US Army Combat Capabilities Development Command Army Research Laboratorys cleanroom provides an option for platinum Pt 111 electrode deposition. Bottom electrodes deposited at 500-800 deg C and 800- 1000 thickness were characterized by four-point probe, X-ray diffraction XRD, and atomic force microscopy. The Pt 111 had a minimum 222 rocking curve full width at half maximum FWHM of 1.6 0.1 at 600 C.

Subject Categories:

  • Electrical and Electronic Equipment

Distribution Statement:

[A, Approved For Public Release]