Developing a Hybrid SThM-SEM System with High Spatiotemporal Resolutin for Transient Thermal Characterization of Electronic Materials and Devices
Technical Report,01 Apr 2018,31 Mar 2020
UNIVERSITY OF CALIFORNIA MERCED MERCED United States
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The electron beam e-beam in the scanning electron microscopy SEM provides an appealing mobile heating source for thermal metrology with spatial resolution of 1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. We demonstrated the capability of using e-beam SEM as a quantitative heating source from both experimental and theoretical approaches, and further e-beam based thermal conductivity measurement promotes this heating source characterization. This provides a foundation to adopt e-beam to develop high resolution thermal probing techniques in SEM in addition to its high- resolution imaging capability.
- Particle Accelerators
- Electrooptical and Optoelectronic Devices