Accession Number:

AD1107166

Title:

Developing a Hybrid SThM-SEM System with High Spatiotemporal Resolutin for Transient Thermal Characterization of Electronic Materials and Devices

Descriptive Note:

Technical Report,01 Apr 2018,31 Mar 2020

Corporate Author:

UNIVERSITY OF CALIFORNIA MERCED MERCED United States

Personal Author(s):

Report Date:

2020-08-15

Pagination or Media Count:

45.0

Abstract:

The electron beam e-beam in the scanning electron microscopy SEM provides an appealing mobile heating source for thermal metrology with spatial resolution of 1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. We demonstrated the capability of using e-beam SEM as a quantitative heating source from both experimental and theoretical approaches, and further e-beam based thermal conductivity measurement promotes this heating source characterization. This provides a foundation to adopt e-beam to develop high resolution thermal probing techniques in SEM in addition to its high- resolution imaging capability.

Subject Categories:

  • Particle Accelerators
  • Electrooptical and Optoelectronic Devices
  • Thermodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE