Accession Number:

AD1096863

Title:

Hierarchical Laser Patterning of Indium Tin Oxide Thin Films

Descriptive Note:

Journal Article - Open Access

Corporate Author:

NAVAL RESEARCH LAB WASHINGTON DC WASHINGTON United States

Personal Author(s):

• Charipar,Nicholas
• Auyeung,Raymond C
• Kim,Heungsoo
• Charipar,Kristin
• Pique,Alberto

Report Date:

2019-06-20

Pagination or Media Count:

11.0

Abstract:

Multiscale laser patterning of indium tin oxide thin films using the combination of direct laser interference patterning DLIP and laser induced periodic surface structuring LIPSS was studied. By balancing DLIP and LIPSS, structures in an ordered hierarchical pattern consisting of 75 nm LIPSS, 650 nm DLIP, and 50 mu m laser spot size were demonstrated. The effects of laser fluence on the DLIP, LIPSS, and grain growth are discussed. The anisotropic conductance due to LIPSS was shown to exceed 50,0001. Infrared reflectance measurements indicated that the anisotropy was uniform across the laser patterned samples.

Descriptors:

• angle of incidence
• electric fields
• electrical conductivity
• electrical measurement
• electrical properties
• grain growth
• materials laboratories
• measurement
• optical properties
• surface roughness
• thin films
• femtosecond lasers
• oxide films
• materials
• materials processing
• laser beams
• lasers
• waveplates
• materials science
• optical materials

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE