The Structure and Properties of Amorphous Indium Oxide
Journal Article - Open Access
University of Texas at San Antonio San Antonio United States
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A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-to-crystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction GIXRD, Hall transport measurement, high resolution transmission electron microscopy HRTEM, electron diffraction, extended X-ray absorption fine structure EXAFS, and ab initio molecular dynamics MD liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structureproperty relationship.
- Electrical and Electronic Equipment
- Inorganic Chemistry
- Atomic and Molecular Physics and Spectroscopy