Accession Number:

AD1094083

Title:

The Structure and Properties of Amorphous Indium Oxide

Descriptive Note:

Journal Article - Open Access

Corporate Author:

University of Texas at San Antonio San Antonio United States

Report Date:

2014-09-02

Pagination or Media Count:

14.0

Abstract:

A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-to-crystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction GIXRD, Hall transport measurement, high resolution transmission electron microscopy HRTEM, electron diffraction, extended X-ray absorption fine structure EXAFS, and ab initio molecular dynamics MD liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structureproperty relationship.

Subject Categories:

  • Electrical and Electronic Equipment
  • Inorganic Chemistry
  • Atomic and Molecular Physics and Spectroscopy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE