Multiobjective Optimization of Deflection and Curvature Radius in a Microelectromechanical System (MEMS) Bimorph Cantilever Actuator Driven by Shape Memory Alloy (SMA) Thin-Film Phase Change
Technical Report,01 Aug 2019,31 Dec 2019
CCDC Army Research Laboratory Adelphi
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At the microscale, shape memory alloy SMA microelectromechanical system MEMS bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape-memory MEMS bimorph was identified, formulated, and solved. Thicknesses of the SU-8 photoresist and nickel-titanium alloy NiTi were identified that yielded maximum deflections and curvature radius based on a relationship among individual layer thicknesses, elastic modulus, and cantilever length. This model should serve as a guideline for optimal NiTi and SU-8 thicknesses to drive large deflections and curvature radius that are most suitable for microrobotic actuation, micromirrors, micropumps, and microgrippers.
- Electrical and Electronic Equipment
- Metallurgy and Metallography