Instrumentation Up-Fit for Reactive Nanolaminate PVD
Technical Report,09 Mar 2016,08 Sep 2016
North Carolina State University Raleigh United States
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PI Maria conducted an instrument upfit for physical vapor deposition PVD systems that combines electron beam e-beam evaporation with magnetron sputtering and pulsed laser deposition. The original instrumentation was supported by a 2014 DURIP award to enable clean, uniform, and rapid deposition of a wide variety of metallic, semiconducting, and ceramic thin films that serve multiple current and pending DoD programs at NCSU. While this instrumentation benefits several programs, its primary role is to support nanoenergetic materials research and the new NCSU-led MURI Multi-modal Energy Flow at Atomically Engineered Interfaces.
- Test Facilities, Equipment and Methods