Thermodynamic Stability of the Q-2 DEG at the Oxide/Oxide Interface under Extreme Thermomechanical Conditions
Technical Report,30 Sep 2012,29 Mar 2018
University of Texas at Austin Austin United States
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This was a very successful project that culminated in important discoveries, supported seven Ph.D. students and resulted in over fifty publications. The main focus of the study was the two-dimensional electron gas 2DEG at the interface of oxides with oxygen-deficient SrTiO3 STO. We demonstrated that at elevated temperature in high vacuum many metals scavenge oxygen from STO. This led to the discovery of large magnetoresistance in the 2DEG at the STOEuO interface with possible applications in spintronics. Of practical importance is our development of atomic layer deposition ALD of several transition metal oxidesTMOs and their integration on semiconductors. The lower thermal budget of ALD opens a way of integrating functionality of TMOs in the back end process.
- Electrical and Electronic Equipment