Steps Toward Computational Guided Deprocessing of Integrated Circuits
Synchrotron Research, Incorporated Melbourne Beach United States
Pagination or Media Count:
We explore development of an extensible programmatic workflow combining automated adaptive CNC backside deprocessing with automated plasma FIB Gas-Assisted Delayering and montage SEM imaging. Intelligent automation is realized by bridging FIB-SEM instrument control with a computational image processing engine using a python scripting API. Tomographic reconstruction via automated back-side ultra-thinning coupled to automated gas-assisted plasma FIB delayering and automated SEM imaging is demonstrated for the first time. Further, we outline and promote development of an instrument control interface which permits secure rapid development of custom proprietary application specific modules without absolute reliance on OEM FIB-SEM hardware or software. Implementation of compressed sensing and dynamic stage scanning to allow arbitrarily large area delayering is also discussed.
- Test Facilities, Equipment and Methods
- Machinery and Tools