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Acquisition of an Advanced Mask Aligner and a Spin Coater Unit for Research at Micro and Nanoscale for Energy Harvesting and Nanoelectronics at Alabama A and M University

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Technical Report,29 Aug 2016,28 Aug 2017

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Alabama A and M University Normal United States

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The objective of this project is to acquire a state-of-the-art mask aligner system and a spin coater unit to enable researchers at the Alabama A and M University AAMU to fabricate the micro- and nanoscales devices. An advanced SUSS MA6 Gen4 Pro manual mask aligner, a CEE Model 200CBX spinbake unit, and a Venus50XL-HF bench-top plasma cleaningetching system have been purchased with the DoDARO funding and installed in the Clean Room in the Engineering building at the Alabama A and M University. The project has been completed successfully as proposed. After the project was awarded by ARO in August 2016, we immediately contacted the Suss MicroTec Company and the Brewer Science Company which were proposed as the manufacturers of the two systems in the original proposal, and ordered the SUSS MA6 Gen4 Promanual mask aligner, the newest model of Suss MA6, and the CEE Model 200CBX spinbakeunit as proposed. Because we received an education discount for the mask aligner from the SussMicroTec Company, we had a surplus funding of about 20,000 for purchasing a bench-top plasma cleaningetching system, which is an important instrument in the fabrication of micro and nanoscale devices and was lacking in our Clean Room. After the approval of the ARO Program Managers, a Venus50XL-HF bench-top plasma cleaningetching system was ordered from the Plasma Etch Company. The purchase order for purchasing the mask aligner was issued to the Suss MicroTec Company by AAMU in October 2016. The system was then manufactured by the Suss MicroTec Company, and was received by AAMU in February 2017. The installation of the system in the AAMU-EE Clean Room was completed in March 2017, and the start up of the system and operation training were done by the engineer from the Suss MicroTec Company in March 2017. The purchase order for purchasing the CEE Model 200CBX spinbake unit was issued to the Brewer Science Company by AAMU in October 2016.

Subject Categories:

  • Machinery and Tools

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