Accession Number:



Nanofabrication Technology for Production of Quantum Nano-Electronic Devices Integrating Niobium Electrodes and Optically Transparent Gates

Descriptive Note:

[Technical Report, Technical Report]

Corporate Author:

Space and Naval Warfare Systems Center Pacific

Personal Author(s):

Report Date:


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This technical report demonstrates nanofabrication technology for Niobium heterostructures and nanoscale quantum devices suitable for implementation in novel qubitquantum memory. In particular electron beam lithography and atomic layer deposition are used. These processes integrate layouts suitable for high frequency microwaveRF excitation of the qubitsquantum memory as well as optically transparent gates in the area of the tunnel junction to enable combined spectroscopy and transport measurements while tuning the energy band at the tunnel junction. These devices are suitable for characterization in a cryo-magneto-optical probe station to access the superconducting regime of operation and that could be used for control and sending of qubitquantum memory states to remote locations.


Subject Categories:

  • Quantum Theory and Relativity
  • Inorganic Chemistry
  • Metallurgy and Metallography

Distribution Statement:

[A, Approved For Public Release]