Accession Number:

AD1042068

Title:

Evanescent Waves in High Numerical Aperture Aplanatic Solid Immersion Microscopy: Effects of Forbidden Light on Subsurface Imaging (Open Access, Publisher's Version)

Descriptive Note:

Journal Article - Open Access

Corporate Author:

Boston University Boston United States

Report Date:

2014-03-24

Pagination or Media Count:

12.0

Abstract:

The collection of light at very high numerical aperture allows detection of evanescent waves above the critical angle of total internal reflection in solid immersion lens microscopy. We investigate the effect of such evanescent modes, so-called forbidden light, on the far-field imaging properties of an aplanatic solid immersion microscope by developing a dyadic Greens function formalism in the context of subsurface semiconductor integrated circuit imaging. We demonstrate that the collection of forbidden light allows for sub-diffraction spatial resolution and substantial enhancement of photon collection efficiency albeit inducing wave-front discontinuities and aberrations.

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE