Effects on Ferroelectric Thin-Film Stacks and Devices for Piezoelectric MEMS Applications at Varied Total Ionizing Dose (TID)
U.S. Army Research Laboratory Adelphi United States
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Lead zirconate titanate PZT based thin films play a key role in a wide variety of applications due to its ferroelectric, piezoelectric, and pyroelectric properties. This work provides information on the effects of 60Co radiation at different total ionization doses TID on theferroelectric, dielectric, and piezoelectric properties of PZT PiezoMEMS actuator devices with two different top electrodes. Overall, the devices with IrO2 top electrode were less impacted by the irradiation compared to the Pt top electrode devices.
- Electricity and Magnetism