Accession Number:

AD1041922

Title:

Aberration Compensation in Aplanatic Solid Immersion Lens Microscopy

Descriptive Note:

Journal Article

Corporate Author:

Boston University Boston United States

Report Date:

2013-11-08

Pagination or Media Count:

9.0

Abstract:

The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture NA 3.5 microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

Subject Categories:

  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE