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Accession Number:
AD1041922
Title:
Aberration Compensation in Aplanatic Solid Immersion Lens Microscopy
Descriptive Note:
Journal Article
Corporate Author:
Boston University Boston United States
Report Date:
2013-11-08
Pagination or Media Count:
9.0
Abstract:
The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture NA 3.5 microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE