Accession Number:



Acquisition of Infrared Variable Angle Spectroscopic Ellipsometer (IR-VASE)

Descriptive Note:

Technical Report,01 Feb 2015,31 Jan 2016

Corporate Author:

University of Puerto Rico at Mayaguez Mayaguez Puerto Rico

Personal Author(s):

Report Date:


Pagination or Media Count:



This award was used to acquire a J.A. Woollam Infrared Variable Angle Spectroscopic Ellipsometer IR-VASE. The IR-VASE unit is capable of obtaining crucial IR information of ultrathin films whilst being complemented with ellipsometry data. This powerful and versatile instrument is the most accurate for optically characterizing surfaces in the infrared spectrum. It provides accurate optical constants, film thickness, chemical information, semiconductor doping levels, and phonon absorption spectra. It has the capability to study liquidsolid interfaces, common in both biology and chemistry applications. Moreover, a thermal stage was acquired to enable characterization in a wide variety of environmental conditions. The installation of the system at the Center for Nanostructured Characterization was completed in October 2015. The IR-VASE will support research in nanotechnology, materials science and engineering, and bioengineering from the Departments of Chemical, General, and Mechanical Engineering, and Chemistry as well.

Subject Categories:

  • Test Facilities, Equipment and Methods

Distribution Statement: