INDEPENDENT EVALUATION OF THE GAM EX5ALN MINIATURE LINE-NARROWED KRF EXCIMER LASER
Technical Report,01 Sep 2016,31 Dec 2016
MARYLAND UNIV BALTIMORE COUNTY BALTIMORE MD BALTIMORE United States
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The scope of this effort was to determine how the GAM Ex5ALN Line-Narrowed Ruggedized KrF Excimer Laser operates compared to the manufacturers specifications. Evaluation criteria included measurements of the output power, pulse-to-pulse stability, laser pulse length, bandwidth, trigger jitter, pulse profile, and fill-gas lifetime. In general, the laser performs satisfactorily and in accord with the manufacturers specifications. Principal recommendations are for the manufacturer to resolve software problems and provide more complete instructions for installation, servicing, and operation.
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