Integration of Quantum Cascade Lasers and Passive Waveguides
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MIT Lincoln Laboratory Lexington United States
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We report on monolithic integration of active quantum cascade laser QCL materials with passive waveguidesformed by using proton implantation. Proton implantation reduces the electron concentration in the QCLlayers by creating deep levels that trap carriers. This strongly reduces the intersubband absorption and thefree-carrier absorption in the gain region and surrounding layers, thus significantly reducing optical loss.
- Lasers and Masers
- Electrical and Electronic Equipment