A Scalable Fabrication Process for Liquid Crystal Based Uncooled Thermal Imagers
Journal Article - Open Access
MIT Lincoln Laboratory Lexington United States
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A novel sensor is being developed for a new uncooled imager technology that is scalable to large formats tens of mega pixels which is greater than what is achieved by commercial micro-bolometer arrays. In this novel sensor, a liquid crystal transducer is used to change a long-wavelength infrared scene into a visible image that can be detected using a conventional visible imager. This approach has the potential for making a more flexible thermal sensor that can be optimized for a variety of applications. In this paper, we describe the microfabrication processes required to create an array of sealed, thermally isolated micro-cavities filled with liquid crystals to be used for an uncooled thermal imager. Experimental results from the fabricated arrays will also be discussed.
- Physical Chemistry