Nonlinear Elasticity of Doped Semiconductors
Technical Report,12 Nov 2015,12 Nov 2016
Michigan State University East Lansing United States
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In this report Michigan State University MSU provides the results of studying the temperature dependence of thefrequency shift and the amplitude dependence of the vibration frequency for 100 length extension modes in n-dopedsilicon Si microelectromechanical MEMS resonators. MSU also has started a comparison with the experimental datafrom the Stanford University group. The obtained results show that the goal of the project has been reached. MSU hasfull quantitative theory of the temperature- and density-dependent change of the vibration frequency of eigenmodes inresonators and of their dependence on the vibration amplitude.
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