Accession Number:

AD1014729

Title:

Hybrid Physical Vapor Deposition Instrument for Advanced Functional Multilayers and Materials

Descriptive Note:

Technical Report,01 Aug 2014,31 Jul 2015

Corporate Author:

North Carolina State University Raleigh United States

Personal Author(s):

Report Date:

2016-04-27

Pagination or Media Count:

11.0

Abstract:

PI Maria received support to construct a physical vapor deposition PVD system that combines electron beam e-beam evaporation, magnetron sputtering, pulsed laser ablation, and ion-assisted deposition. The instrumentation enables clean, uniform, and rapid deposition of a wide variety of metallic, semiconducting, and ceramic thin films with microstructures and composite geometries enhanced by energetic bombardment during growth.

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE