Accession Number:

AD1011570

Title:

Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates

Descriptive Note:

Technical Report

Corporate Author:

US Army Research Laboratory Adelphi United States

Personal Author(s):

• Olver,Kimberley A.

Report Date:

2016-07-01

Pagination or Media Count:

16.0

Abstract:

A fabrication process for creating a silicon dioxide SiO2 light-trapping structure as part of an anti-reflective AR coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as complete islanding. By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.

Descriptors:

• solar cells
• fabrication
• silicon dioxide
• antireflection coatings
• electron beams
• agglomerates
• semiconductors
• electromagnetic radiation

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE