Accession Number:
AD1011570
Title:
Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates
Descriptive Note:
Technical Report
Corporate Author:
US Army Research Laboratory Adelphi United States
Personal Author(s):
Report Date:
2016-07-01
Pagination or Media Count:
16.0
Abstract:
A fabrication process for creating a silicon dioxide SiO2 light-trapping structure as part of an anti-reflective AR coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as complete islanding. By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.