Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates
US Army Research Laboratory Adelphi United States
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A fabrication process for creating a silicon dioxide SiO2 light-trapping structure as part of an anti-reflective AR coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as complete islanding. By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.