Breakthrough UV LIGA Microfabrication of Sub-mm and THz Circuits
U.S. Naval Research Laboratory Washington United States
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The U.S. Naval Research Laboratory has been developing a novel UV-LIGA process to create amplifier circuits from 100 GHz through the THz. A 670 GHz EIK ladder test piece has been successfully fabricated with a 0.004 inch diameter beam tunnel, and demonstrates sub-micronfabrication accuracies. The technique is being extended to showcase capabilities at 850 GHz, and 1.03, 1.35 and 1.50 THz.