Accession Number:

AD1004172

Title:

Breakthrough UV LIGA Microfabrication of Sub-mm and THz Circuits

Descriptive Note:

Technical Report

Corporate Author:

U.S. Naval Research Laboratory Washington United States

Personal Author(s):

• Joye,Colin D.
• Cook,Alan M.
• Calame,Jeffrey P.
• Abe,David K.
• Levush,Baruch

Report Date:

2013-01-01

Pagination or Media Count:

2.0

Abstract:

The U.S. Naval Research Laboratory has been developing a novel UV-LIGA process to create amplifier circuits from 100 GHz through the THz. A 670 GHz EIK ladder test piece has been successfully fabricated with a 0.004 inch diameter beam tunnel, and demonstrates sub-micronfabrication accuracies. The technique is being extended to showcase capabilities at 850 GHz, and 1.03, 1.35 and 1.50 THz.

Descriptors:

• CIRCUITS
• TEST AND EVALUATION
• FABRICATION

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE