Accession Number:

AD0919567

Title:

Thin Film Optical Waveguide Technology.

Descriptive Note:

Final rept. Apr 72-Oct 73,

Corporate Author:

PERKIN-ELMER CORP NORWALK CT

Personal Author(s):

• Zernike, Frits

Report Date:

1974-03-01

Pagination or Media Count:

56.0

Abstract:

Passive thin film waveguide components investigated under this contract were 1 coupled waveguides, 2 waveguide lenses, 3 taper couplers, 4 waveguides with more or less rectangular cross sections. The coupling between waveguides was investigated in detail, both theoretically and experimentally. Methods for making 3-dB couplers and switches are described. Different experimental methods of making waveguide lenses were attempted however, only two were found to be useful one produces a lens with rectangular contours but thicker in the center and the other produces a round domed lens. Different tapers were investigated. It was found that a well-defined narrow output input angle can be obtained by using a very slow taper. Waveguides with trapezoidal cross sections were produced by sputter-etching of slab type waveguides using photoresist masks. The necessary patterns in these masks were made by exposing the photoresist pattern with a focused beam from a He-Cd laser operating at 4416A. Author

Descriptors:

• *THIN FILMS)
• (*WAVEGUIDES
• INTEGRATED SYSTEMS
• OPTICS
• LASERS
• LENSES
• SPUTTERING
• MASKING
• DEPOSITION
• PASSIVE SYSTEMS
• ETCHING
• MIXTURES
• COUPLING CIRCUITS
• THREE DIMENSIONAL
• REFRACTIVE INDEX
• SILICON DIOXIDE
• SUBSTRATES
• THICKNESS
• PROPAGATION
• MANGANESE
• GLASS
• HELIUM
• CADMIUM
• GOLD
• BARIUM OXIDES

Subject Categories:

• Electrical and Electronic Equipment
• Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE