Accession Number:
AD0912049
Title:
Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.
Descriptive Note:
Quarterly rept. No. 7, 1Oct 72-1 Jan 73,
Corporate Author:
TEXAS INSTRUMENTS INC DALLAS
Personal Author(s):
Report Date:
1973-01-01
Pagination or Media Count:
17.0
Abstract:
During the seventh quarter of this contract, significant achievements included a performance evaluation and debug of the Kent Cambridge Instruments Lanthanum Hexaboride electron gun and improvement of the process for marker definition for e-beam alignment. In addition, a trial lot was completed which tested the upgraded pattern definition and auto-align system APR II, and six transistor lots were processed through the composite definition level.
Descriptors:
Subject Categories:
- Electrical and Electronic Equipment
- Fabrication Metallurgy