Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.
Quarterly rept. No. 7, 1Oct 72-1 Jan 73,
TEXAS INSTRUMENTS INC DALLAS
Pagination or Media Count:
During the seventh quarter of this contract, significant achievements included a performance evaluation and debug of the Kent Cambridge Instruments Lanthanum Hexaboride electron gun and improvement of the process for marker definition for e-beam alignment. In addition, a trial lot was completed which tested the upgraded pattern definition and auto-align system APR II, and six transistor lots were processed through the composite definition level.
- Electrical and Electronic Equipment
- Fabrication Metallurgy