Accession Number:

AD0912049

Title:

Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.

Descriptive Note:

Quarterly rept. No. 7, 1Oct 72-1 Jan 73,

Corporate Author:

TEXAS INSTRUMENTS INC DALLAS

Report Date:

1973-01-01

Pagination or Media Count:

17.0

Abstract:

During the seventh quarter of this contract, significant achievements included a performance evaluation and debug of the Kent Cambridge Instruments Lanthanum Hexaboride electron gun and improvement of the process for marker definition for e-beam alignment. In addition, a trial lot was completed which tested the upgraded pattern definition and auto-align system APR II, and six transistor lots were processed through the composite definition level.

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE