Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.
Quarterly rept. no. 5, 1 Apr-1 Jul 72,
TEXAS INSTRUMENTS INC DALLAS
Pagination or Media Count:
The purpose of this contract is to establish and demonstrate, under production conditions, the use of electron-beam photolithography in the fabrication of integrable microwave transistors. Author
- Electrical and Electronic Equipment
- Particle Accelerators