Accession Number:

AD0905638

Title:

Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.

Descriptive Note:

Quarterly rept. no. 5, 1 Apr-1 Jul 72,

Corporate Author:

TEXAS INSTRUMENTS INC DALLAS

Report Date:

1972-07-01

Pagination or Media Count:

28.0

Abstract:

The purpose of this contract is to establish and demonstrate, under production conditions, the use of electron-beam photolithography in the fabrication of integrable microwave transistors. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Plastics
  • Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE