Accession Number:

AD0879574

Title:

Fundamental Studies of Semiconductor Heteroepitaxy

Descriptive Note:

Semiannual rept. no. 1

Corporate Author:

AUTONETICS ANAHEIM CA

Personal Author(s):

Report Date:

1971-01-28

Pagination or Media Count:

47.0

Abstract:

The report contains a fundamental study of the nucleation and film growth mechanisms in heteroepitaxial semiconductor thin films, and applies the results to the preparation of improved thin films and thin-film devices on insulating substrates. The program involves both theoretical and experimental investigations. The emphasis is on chemical vapor deposition CVD techniques.

Subject Categories:

  • Crystallography
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE