Fundamental Studies of Semiconductor Heteroepitaxy
Semiannual rept. no. 1
AUTONETICS ANAHEIM CA
Pagination or Media Count:
The report contains a fundamental study of the nucleation and film growth mechanisms in heteroepitaxial semiconductor thin films, and applies the results to the preparation of improved thin films and thin-film devices on insulating substrates. The program involves both theoretical and experimental investigations. The emphasis is on chemical vapor deposition CVD techniques.
- Solid State Physics