Accession Number:

AD0869162

Title:

The Technology of Epitaxial Silicon Layers from SiCl4.

Descriptive Note:

Research and development rept. Mar 68-Jun 69,

Corporate Author:

NAVAL ELECTRONICS LAB CENTER SAN DIEGO CA

Personal Author(s):

Report Date:

1970-01-30

Pagination or Media Count:

23.0

Abstract:

Procedures for the deposition of epitaxial layers for integrated circuits were developed, and the capacity to produce device-quality epitaxial layers was successfully established. Specific problems that occurred were analyzed and corrective procedures outlined. Author

Subject Categories:

  • Electrical and Electronic Equipment
  • Coatings, Colorants and Finishes
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE