The Technology of Epitaxial Silicon Layers from SiCl4.
Research and development rept. Mar 68-Jun 69,
NAVAL ELECTRONICS LAB CENTER SAN DIEGO CA
Pagination or Media Count:
Procedures for the deposition of epitaxial layers for integrated circuits were developed, and the capacity to produce device-quality epitaxial layers was successfully established. Specific problems that occurred were analyzed and corrective procedures outlined. Author
- Electrical and Electronic Equipment
- Coatings, Colorants and Finishes
- Manufacturing and Industrial Engineering and Control of Production Systems