Accession Number:

AD0855286

Title:

Manufacturing Technique for Low-Temperature Silicon Deposition.

Descriptive Note:

Final rept. 1 Feb 68-31 Jan 69,

Corporate Author:

RCA LABS PRINCETON NJ

Report Date:

1969-06-01

Pagination or Media Count:

87.0

Abstract:

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE