Accession Number:

AD0854179

Title:

Dielectric Isolation Process Development.

Descriptive Note:

Final rept. 15 Jun 66-31 Oct 68,

Corporate Author:

PHILCO-FORD CORP BLUE BELL PA MICROELECTRONICS DIV

Personal Author(s):

• Hastings,Joseph A.

Report Date:

1969-03-01

Pagination or Media Count:

363.0

Abstract:

Descriptors:

• *INTEGRATED CIRCUITS
• MANUFACTURING
• SUBSTRATES
• SILICON
• SILICON DIOXIDE
• SILANES
• VAPOR PLATING
• DIELECTRIC PROPERTIES
• ELECTRICAL INSULATION
• DOPING
• TRANSISTORS
• EPITAXIAL GROWTH

Subject Categories:

• Electrical and Electronic Equipment
• Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE