Manufacturing Methods for Integrated Circuits Using MOS Transistors.
Final rept. 1 Jan 67-31 Oct 68,
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A report is made on phased program to establish the manufacturing methods for complementary N and P channel enhancement mode and N channel depletion mode MOS integrated circuits. The major phases of the program were 1 Device Selection 2 Establishment of a Fabricating Process 3 Pilot Line Production, and 4 Reliability Evaluation. Author
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems