Accession Number:

AD0847073

Title:

Application of Thin Films in Electronics,

Descriptive Note:

Corporate Author:

FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH

Personal Author(s):

• Boros-Gyevi, J.
• Motal, G.

Report Date:

1968-04-25

Pagination or Media Count:

26.0

Abstract:

The article reviews the application of thin films produced by vacuum evaporation, cathode sputtering, diffusion and epitaxial growing in the field of passive and active electric components and in microminiaturization. Some of the characteristics of thin films are summarized. Author

Descriptors:

• (*MINIATURE ELECTRONIC EQUIPMENT
• METAL FILMS)
• SEMICONDUCTOR DEVICES
• SINGLE CRYSTALS
• EPITAXIAL GROWTH
• SURFACE PROPERTIES
• HUNGARY

Subject Categories:

• Electrical and Electronic Equipment
• Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE