Helium Tracer Gas Fine Leak Test Analysis
ROME AIR DEVELOPMENT CENTER GRIFFISS AFB NY
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The helium tracer gas fine leak seal test, as specified in MIL-STD- 883, method 1014, test condition A, based on the back-pressurization technique for determining the hermeticity of microelectronic device packages, is described. The sensitivity of seal test parameter variations to package leak rate measurement test results is analyzed in detail by a systematic variation of exposure pressure, exposure time and dwell time over the complete range of microelectronic package volumes. Analysis results verify the need for specifying standard seal test conditions, for defined package volumes, as required in MIL- STD-883, to insure that the specified level of package hermeticity will be achieved. Microelectronic device reliability as related to package volume leak rate atm ccsec is discussed. Microcircuit failure modes and associated failure mechanisms dependent on package hermeticity are presented.
- Polymer Chemistry
- Electrical and Electronic Equipment