ON THE PROBLEMS OF VACUUM TECHNOLOGY IN THE PREPARATION OF THIN FILMS (K OTAZKAM VAKUOVE TECHNOLOGIE PRI PRIPRAVE TENKYCH VRSTEV),
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH
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The article presents a survey of modern methods of vacuum technique, a knowledge and mastery of which are necessary in the production of thin layers.
- Metallurgy and Metallography
- Manufacturing and Industrial Engineering and Control of Production Systems