DETERMINATION OF THICKNESS AND COMPOSITION OF THIN FILMS BY THE METHOD OF X-RAY FLUORESCENCE.
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING
Pagination or Media Count:
X-Ray fluorescence techniques were used to determine the thickness and composition of films of solid solution cadmium sulfideselenide, using a G.E.XRD-6 system. Standard curves of Se K lambda and Cd K lambda x-ray fluorescence intensities versus film thickness were established for films CdSe percentages 0,25,50,77, and 100 up to 10.00 microns thick on aluminum substrates. Film thickness accuracies were 0.200 plus or minus 0.05-10.00 plus or minus 0.40 microns. Se K lambda to Cd K lambda intensity ratio was used to determine film composition to within 2. Effects of molybdenum, niobium, copper, and glass substrates on fluorescence intensities were determined. Author
- Metallurgy and Metallography
- Atomic and Molecular Physics and Spectroscopy