RESEARCH ON VAPOR PLATING FROM ORGANOMETALLIC COMPOUNDS.
Summary technical rept. 1 Jul 66-31 Oct 67,
GENERAL TECHNOLOGIES CORP SPRINGFIELD VA
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Experimental work was conducted to evaluate and optimize methods for the chemical vapor deposition of titanium, tungsten, molybdenum, boron, iridium and vanadium, respectively, from selected organometallic compounds. Box statistical experimental design methods were used in the work to facilitate the study of the effects of the deposition parameters on the properties of the deposits and to isolate the path of steepest ascent for optimizing the deposition conditions to give the purest deposits obtainable. Author
- Organic Chemistry
- Fabrication Metallurgy