THIN FILM RC NETWORKS FOR SILICON INTEGRATED CIRCUITS.
Final rept. 1 Aug 66-1 Nov 67,
MOTOROLA INC PHOENIX AZ SEMICONDUCTOR GROUP
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Resistor and capacitor elements were fabricated on oxidized silicon substates. Individual components, as well as resistor-transistor, capacitor-transistor, and resistor-capacitor-transistor integrated networks, were fabricated and tested with regard to their performance and reliability.
- Electrical and Electronic Equipment