Optical Waveguides from Selected II-IV Semiconductors by Ion Implantation and Diffusion.
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING
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Several II-VI semiconductors were examined for their usability as optical waveguides. A reproducible procedure was developed for polishing II-VI compounds to optical flatness. The procedure was especially effective for ZnSe and ZnTe. Ion implantation and diffusion were used with several combinations of dopants and substrates in attempts to produce both planar and channel optical waveguides. Proton enhanced diffusion of Cd into ZnSe produced a lossy planar waveguide, while diffusing Cd into ZnTe produced an excellent quality planar waveguide. This was the first positive proof of successful diffusion of Cd into ZnTe. Author
- Electrical and Electronic Equipment
- Fiber Optics and Integrated Optics