Accession Number:

AD0783870

Title:

Study of Electronic Transport and Breakdown in Thin Insulating Films

Descriptive Note:

Semi-annual technical rept. no. 3

Corporate Author:

PRINCETON UNIV NJ DEVICE PHYSICS LAB

Report Date:

1974-01-01

Pagination or Media Count:

25.0

Abstract:

This report reviews progress in a comprehensive research program directed toward a basic understanding of electronic transport, charge trapping, and dielectric breakdown in the thin insulating films used in integrated circuits. Research is reported in the following areas Corona-induced nondestructive breakdown in insulating films Self-quenched breakdown of insulating films Charge-discharge studies of charge-carrier trapping in insulating films Charge injection by electron beam Scanning electron microscope studies Study of lateral nonuniformities in metal-insulator- semiconductor structures Monte-Carlo calculations of hot-electron distributions and Theoretical modeling of local breakdown.

Subject Categories:

  • Electrical and Electronic Equipment
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE