Study of Electronic Transport and Breakdown in Thin Insulating Films
Semi-annual technical rept. no. 3
PRINCETON UNIV NJ DEVICE PHYSICS LAB
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This report reviews progress in a comprehensive research program directed toward a basic understanding of electronic transport, charge trapping, and dielectric breakdown in the thin insulating films used in integrated circuits. Research is reported in the following areas Corona-induced nondestructive breakdown in insulating films Self-quenched breakdown of insulating films Charge-discharge studies of charge-carrier trapping in insulating films Charge injection by electron beam Scanning electron microscope studies Study of lateral nonuniformities in metal-insulator- semiconductor structures Monte-Carlo calculations of hot-electron distributions and Theoretical modeling of local breakdown.
- Electrical and Electronic Equipment
- Solid State Physics