Accession Number:

AD0780186

Title:

Radiation Effects of MOS Gate Insulators.

Descriptive Note:

Final rept. Jul-Dec 73,

Corporate Author:

LEHIGH UNIV BETHLEHEM PA

Personal Author(s):

• Fowkes,Frederick M.
• Kahlke,Walter E.
• Butler,Sidney R.

Report Date:

1974-01-01

Pagination or Media Count:

45.0

Abstract:

Impurity metal ions sodium, aluminum, chromium, and gold were diffused and grown into oxide films on silicon which were then exposed to 1,000,000 rads of ionizing radiation from a cobalt-60 source. The effects of radiation were observed by chemical analysis to determine ion transport and by conductance and capacitance measurements to determine oxide charge and distribution of surface state density. Modified author abstract

Descriptors:

• *Metal oxide semiconductors
• *Radiation effects
• Films
• Gates(Circuits)
• Radiation hardening
• Oxides
• Ions
• Impurities
• Transport properties
• Silicon dioxide
• Silicon
• Sodium
• Aluminum
• Chromium
• Gold
• Gamma rays

Subject Categories:

• Electrical and Electronic Equipment
• Radioactivity, Radioactive Wastes and Fission Products

Distribution Statement:

APPROVED FOR PUBLIC RELEASE