New Microwave-Surface-Acoustic-Wave Transducer.
Final rept. 7 Nov 72-6 Sep 73,
STANFORD RESEARCH INST MENLO PARK CALIF
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The report describes the development of a novel electron-beam image-projection exposure apparatus termed the slit-lens system that has been used to fabricate high-resolution patterns for use as microwave-frequency surface-acoustic-wave transducers. Further research efforts include the development of ancillary techniques for making 1 the intermediate electron-transmission masks required by the slit-lens system, and 2 the thin films necessary for production of metallic patterns on piezoelectric substrates. Various high-frequency surface-wave-transducer structures have been fabricated and electrically tested. The new hybrid-grating transducer has been produced and its performance compared to that of conventional interdigital transducers at microwave frequencies. A theoretical analysis of the hybrid and grating transducer has been carried out and the input impedance of these transducers has been compared with that of a conventional interdigital structure. Particular attention was paid to the effect of parasitic capacitance on the performance of the various transducers. Modified author abstract
- Line, Surface and Bulk Acoustic Wave Devices