Accession Number:

AD0779699

Title:

New Microwave-Surface-Acoustic-Wave Transducer.

Descriptive Note:

Final rept. 7 Nov 72-6 Sep 73,

Corporate Author:

STANFORD RESEARCH INST MENLO PARK CALIF

Personal Author(s):

Report Date:

1974-03-01

Pagination or Media Count:

81.0

Abstract:

The report describes the development of a novel electron-beam image-projection exposure apparatus termed the slit-lens system that has been used to fabricate high-resolution patterns for use as microwave-frequency surface-acoustic-wave transducers. Further research efforts include the development of ancillary techniques for making 1 the intermediate electron-transmission masks required by the slit-lens system, and 2 the thin films necessary for production of metallic patterns on piezoelectric substrates. Various high-frequency surface-wave-transducer structures have been fabricated and electrically tested. The new hybrid-grating transducer has been produced and its performance compared to that of conventional interdigital transducers at microwave frequencies. A theoretical analysis of the hybrid and grating transducer has been carried out and the input impedance of these transducers has been compared with that of a conventional interdigital structure. Particular attention was paid to the effect of parasitic capacitance on the performance of the various transducers. Modified author abstract

Subject Categories:

  • Line, Surface and Bulk Acoustic Wave Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE