Properties of RF Sputtered Zinc Oxide Thin Films for Microwave Acoustic Devices.
NAVAL RESEARCH LAB WASHINGTON D C
Pagination or Media Count:
Various factors involved in the production of piezoelectric zinc oxide thin films and their utilization as acoustic transducers were studied, along with techniques for analysis and fabrication of actual devices. The best transducers in this study exhibited coupling constants approximately 60 as large as the theoretical value and a minimum untuned insertion loss of 30 dB. Bulk transducer technology was emphasized, since analysis of the zinc oxide film is relatively easy in this configuration however, most of the concepts are directly applicable to surface wave transducers, the ultimate motivation for this work. Author
- Electrical and Electronic Equipment